Scanning Electron Microskope (SEM) FEI Quanta 650 FEG

Technical Data
• Acceleration voltage : 200 V to 30 kV
• Control stage: eucentric position
• Analytical systems: simultaneous electron backscatter diffraction (EBSD) and energy dispersive X-ray spectroscopy (EDS) spectrometer
• Auxiliary systems: control camera, fast loading
• External systems: 24h emergency power supply, antimagnetic frame, vibration damping table
• Miscellaneous: beam slowing, concentric solid-state backscatter detector (CBS)

Vacuum Modes
• High vacuum, HiVac (10^-2 to10^-4 Pa)
• Low vacuum, LoVac (10 to 200 Pa)
• Extended vacuum mode, ESEM (10 to 4000 Pa)